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Formation of surface structures during heteroepitaxial thin film growth on prepatterned substrates

  • P. Liu
  • , C. Lu
  • , Y. W. Zhang*
  • *Corresponding author for this work
  • Agency for Science, Technology and Research, Singapore
  • National University of Singapore

Research output: Contribution to journalArticlepeer-review

Abstract

Guided quantum dot self-assembly grown heteroepitaxially on a substrate surface prepatterned with cosinelike humps is studied by computer simulation. The SiGe Si material system is used as a model system, in which the strain energy, surface energy, wetting effect, surface anisotropy, and elastic anisotropy are taken into account. The simulation results reveal the formation of surface structures which may potentially be of practical applications.

Original languageEnglish
Article number085336
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume76
Issue number8
DOIs
StatePublished - 22 Aug 2007
Externally publishedYes

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