On the zero-order diffraction of phase mask

Peng Yue Wen; Xiao Ming Cui; Hong Du Liu; E. Y.B. Pun; P. S. Chung

doi:10.1088/0256-307X/14/11/009

On the zero-order diffraction of phase mask

Peng Yue Wen
, Xiao Ming Cui
, Hong Du Liu
, E. Y.B. Pun
, P. S. Chung

Peking University
City University of Hong Kong

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

Original language	English
Pages (from-to)	830-833
Number of pages	4
Journal	Chinese Physics Letters
Volume	14
Issue number	11
DOIs	https://doi.org/10.1088/0256-307X/14/11/009
State	Published - 1997
Externally published	Yes

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@article{2eef11e3e3464fbaa4fda51fa301fd2a,

title = "On the zero-order diffraction of phase mask",

abstract = "The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.",

author = "Wen, \{Peng Yue\} and Cui, \{Xiao Ming\} and Liu, \{Hong Du\} and Pun, \{E. Y.B.\} and Chung, \{P. S.\}",

year = "1997",

doi = "10.1088/0256-307X/14/11/009",

language = "英语",

volume = "14",

pages = "830--833",

journal = "Chinese Physics Letters",

issn = "0256-307X",

publisher = "IOP Publishing Ltd.",

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TY - JOUR

T1 - On the zero-order diffraction of phase mask

AU - Wen, Peng Yue

AU - Cui, Xiao Ming

AU - Liu, Hong Du

AU - Pun, E. Y.B.

AU - Chung, P. S.

PY - 1997

Y1 - 1997

N2 - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

AB - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

UR - https://www.scopus.com/pages/publications/0031324308

U2 - 10.1088/0256-307X/14/11/009

DO - 10.1088/0256-307X/14/11/009

M3 - 文章

AN - SCOPUS:0031324308

SN - 0256-307X

VL - 14

SP - 830

EP - 833

JO - Chinese Physics Letters

JF - Chinese Physics Letters

IS - 11

ER -

On the zero-order diffraction of phase mask

Abstract

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