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Optical Nanoscale Patterning Through Surface-Textured Polymer Films

  • Ming Fang
  • , Hao Lin
  • , Ho Yuen Cheung
  • , Senpo Yip
  • , Fei Xiu
  • , Chun Yuen Wong
  • , Johnny C. Ho

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)855-860
Number of pages6
JournalAdvanced Optical Materials
Volume2
Issue number9
DOIs
StatePublished - 1 Sep 2014
Externally publishedYes

Keywords

  • Nanoscale patterning
  • Photolithography
  • Photoresists
  • Polymer films
  • Soft masks
  • Surface plasmons

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