@inproceedings{f210d74344ec4e3fa99c923a3708669f,
title = "Parametric study of multi-focal laser processing using an ultrafast tunable acoustic lens",
abstract = "Multi-focal beam shaping can enhance laser processing throughput by increasing the number of processing sites and lowering processing time. This paper implements multi-focal beam shaping by adopting a tunable acoustic gradient of index (TAG) lens, which scans the focal position in the axial direction at 140 kHz. When the laser is synced with the corresponding phases of the TAG lens, multiple focal spots can be selected, allowing for ultrafast and flexible multi-focal modulation without physically moving any optics. We further characterize the tuning parameters of the TAG lens, such as its frequency, amplitude, and phase, and demonstrate the dual-focal marking on both sides of a glass slide in a single lateral scan.",
keywords = "acousto-optofluidic, dual-focal, femtosecond laser, multi-focal, TAG lens, ultrafast, z-scanning",
author = "Xiaohan Du and Camilo Florian and Arnold, \{Craig B.\}",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE.; Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII 2022 ; Conference date: 20-02-2022 Through 24-02-2022",
year = "2022",
doi = "10.1117/12.2607973",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jie Qiao and Aiko Narazaki and Laura Gemini",
booktitle = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII",
address = "美国",
}