Physical and optical properties of sputtered lithium niobate thin films

Dexin X. Lu; E. M. Wong; Edwin Y. Pun; Po Sheun Chung

Physical and optical properties of sputtered lithium niobate thin films

Dexin X. Lu^*
, E. M. Wong
, Edwin Y. Pun
, Po Sheun Chung

^*Corresponding author for this work

City University of Hong Kong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

LiNbO ₃ thin films were deposited by rf magnetron sputtering using LiNbO ₃ ceramic targets on z-cut single crystal LiTaO ₃ substrate. The as-deposited thin films were annealed at 550 degrees Celsius to 650 degrees Celsius for 60 min in oxygen ambient. The results of x-ray diffraction indicate that the dominant orientation of the sputtered LiNbO ₃ thin film is (202). The transmittance spectra of LiNbO ₃ thin films annealed at different temperatures were measured and compared with that of bulk single crystal substrate (the measured wavelength range is from 300 nm to 800 nm). The transmittance drops down to about 10% at 300 nm wavelength and has a value of 70 to approximately 80% at 800 nm wavelength.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	Manfred Eich, Bruce H. Chai, Minhua Jiang
Pages	361-368
Number of pages	8
Volume	2897
State	Published - 1996
Externally published	Yes
Event	Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications - Beijing, China Duration: 6 Nov 1996 → 7 Nov 1996

Conference

Conference	Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications
City	Beijing, China
Period	6/11/96 → 7/11/96

Cite this

@inproceedings{fdea578e110f444ba58a68ee12e02e84,

title = "Physical and optical properties of sputtered lithium niobate thin films",

abstract = "LiNbO 3 thin films were deposited by rf magnetron sputtering using LiNbO 3 ceramic targets on z-cut single crystal LiTaO 3 substrate. The as-deposited thin films were annealed at 550 degrees Celsius to 650 degrees Celsius for 60 min in oxygen ambient. The results of x-ray diffraction indicate that the dominant orientation of the sputtered LiNbO 3 thin film is (202). The transmittance spectra of LiNbO 3 thin films annealed at different temperatures were measured and compared with that of bulk single crystal substrate (the measured wavelength range is from 300 nm to 800 nm). The transmittance drops down to about 10\% at 300 nm wavelength and has a value of 70 to approximately 80\% at 800 nm wavelength.",

author = "Lu, \{Dexin X.\} and Wong, \{E. M.\} and Pun, \{Edwin Y.\} and Chung, \{Po Sheun\}",

year = "1996",

language = "英语",

isbn = "0819422983",

volume = "2897",

pages = "361--368",

editor = "Manfred Eich and Chai, \{Bruce H.\} and Minhua Jiang",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

note = "Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications ; Conference date: 06-11-1996 Through 07-11-1996",

}

Physical and optical properties of sputtered lithium niobate thin films. / Lu, Dexin X.; Wong, E. M.; Pun, Edwin Y. et al.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Manfred Eich; Bruce H. Chai; Minhua Jiang. Vol. 2897 1996. p. 361-368.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Physical and optical properties of sputtered lithium niobate thin films

AU - Lu, Dexin X.

AU - Wong, E. M.

AU - Pun, Edwin Y.

AU - Chung, Po Sheun

PY - 1996

Y1 - 1996

N2 - LiNbO 3 thin films were deposited by rf magnetron sputtering using LiNbO 3 ceramic targets on z-cut single crystal LiTaO 3 substrate. The as-deposited thin films were annealed at 550 degrees Celsius to 650 degrees Celsius for 60 min in oxygen ambient. The results of x-ray diffraction indicate that the dominant orientation of the sputtered LiNbO 3 thin film is (202). The transmittance spectra of LiNbO 3 thin films annealed at different temperatures were measured and compared with that of bulk single crystal substrate (the measured wavelength range is from 300 nm to 800 nm). The transmittance drops down to about 10% at 300 nm wavelength and has a value of 70 to approximately 80% at 800 nm wavelength.

AB - LiNbO 3 thin films were deposited by rf magnetron sputtering using LiNbO 3 ceramic targets on z-cut single crystal LiTaO 3 substrate. The as-deposited thin films were annealed at 550 degrees Celsius to 650 degrees Celsius for 60 min in oxygen ambient. The results of x-ray diffraction indicate that the dominant orientation of the sputtered LiNbO 3 thin film is (202). The transmittance spectra of LiNbO 3 thin films annealed at different temperatures were measured and compared with that of bulk single crystal substrate (the measured wavelength range is from 300 nm to 800 nm). The transmittance drops down to about 10% at 300 nm wavelength and has a value of 70 to approximately 80% at 800 nm wavelength.

UR - https://www.scopus.com/pages/publications/0030373790

M3 - 会议稿件

AN - SCOPUS:0030373790

SN - 0819422983

SN - 9780819422989

VL - 2897

SP - 361

EP - 368

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Eich, Manfred

A2 - Chai, Bruce H.

A2 - Jiang, Minhua

T2 - Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications

Y2 - 6 November 1996 through 7 November 1996

ER -

Physical and optical properties of sputtered lithium niobate thin films

Abstract

Conference

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