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Polymeric optical waveguides fabrication by direct write electron beam lithography

  • Jun Zhou*
  • , W. H. Wong
  • , E. Y.B. Pun
  • *Corresponding author for this work
  • City University of Hong Kong
  • Shandong University of Science and Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31um and 1.55um, respectively.

Original languageEnglish
Title of host publicationNonlinear Guided Waves and Their Applications, NLGW 2001
PublisherOptica Publishing Group (formerly OSA)
Pages55-57
Number of pages3
ISBN (Electronic)1557526702
StatePublished - 2001
Externally publishedYes
EventNonlinear Guided Waves and Their Applications, NLGW 2001 - Clearwater, United States
Duration: 26 Mar 2001 → …

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceNonlinear Guided Waves and Their Applications, NLGW 2001
Country/TerritoryUnited States
CityClearwater
Period26/03/01 → …

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