Abstract
(Al100-xCrx)N (x ≤ 36%) protective film with high transmissivity was deposited onto organic photoconductor (OPC) surface by RF reactive magnetron sputtering. The surface hardness was increased by a factor of 1.5-3.2. The OPC surface protected by (Al100-xCrx)N (x ≤ 71%) film was harder than that by AlN film, and the maximum surface hardness was achieved using ∼47% Cr content. The electrophotographic properties of (Al100-xCrx)N (x ≤ 36%) coated OPC are better than those of either uncoated or AlN-coated OPC. These results confirm the suitability of (Al100-xCrx)N (x ≤ 36%) film to prolong the operating life of OPC.
| Original language | English |
|---|---|
| Pages (from-to) | 180-183 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 324 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - 1 Jul 1998 |
| Externally published | Yes |
Keywords
- AlCrN film
- Electrophotographic properties
- Microhardness
- Organic photoconductors
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