Single-/multi-mode tunable lasers using MEMS mirror and grating

A. Q. Liu; X. M. Zhang; J. Li; C. Lu

doi:10.1016/S0924-4247(03)00368-6

Single-/multi-mode tunable lasers using MEMS mirror and grating

A. Q. Liu^*
, X. M. Zhang
, J. Li
, C. Lu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

Original language	English
Pages (from-to)	49-54
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	108
Issue number	1-3
DOIs	https://doi.org/10.1016/S0924-4247(03)00368-6
State	Published - 15 Nov 2003
Externally published	Yes

Keywords

Blazed grating
DWDM
MEMS
Optical MEMS
Tunable laser

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10.1016/S0924-4247(03)00368-6

Cite this

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title = "Single-/multi-mode tunable lasers using MEMS mirror and grating",

abstract = "The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.",

keywords = "Blazed grating, DWDM, MEMS, Optical MEMS, Tunable laser",

author = "Liu, \{A. Q.\} and Zhang, \{X. M.\} and J. Li and C. Lu",

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AU - Liu, A. Q.

AU - Zhang, X. M.

AU - Li, J.

AU - Lu, C.

PY - 2003/11/15

Y1 - 2003/11/15

N2 - The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

AB - The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

KW - Blazed grating

KW - DWDM

KW - MEMS

KW - Optical MEMS

KW - Tunable laser

UR - https://www.scopus.com/pages/publications/0344083445

U2 - 10.1016/S0924-4247(03)00368-6

DO - 10.1016/S0924-4247(03)00368-6

M3 - 文章

AN - SCOPUS:0344083445

SN - 0924-4247

VL - 108

SP - 49

EP - 54

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1-3

ER -

Single-/multi-mode tunable lasers using MEMS mirror and grating

Abstract

Keywords

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