@inproceedings{2337cf84d5b24e24a1feb671c5d082df,
title = "Wafer-scale thin-film lithium niobate device fabrication and characterization",
abstract = "Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of - 0.1 dB/cm.",
keywords = "lithium niobate, photonic integrated circuit, quality factor, wafer-scale",
author = "Wenzhao Sun and Ke Zhang and Hanke Feng and Cheng Wang",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Region 10 International Conference, TENCON 2022 ; Conference date: 01-11-2022 Through 04-11-2022",
year = "2022",
doi = "10.1109/TENCON55691.2022.9977696",
language = "英语",
series = "IEEE Region 10 Annual International Conference, Proceedings/TENCON",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "Proceedings of 2022 IEEE Region 10 International Conference, TENCON 2022",
address = "美国",
}