Anisotropy of the elastic properties of wurtzite InN epitaxial films

V. S. Harutyunyan; P. Specht; J. Ho; E. R. Weber

doi:10.4028/www.scientific.net/ddf.226-228.79

Anisotropy of the elastic properties of wurtzite InN epitaxial films

V. S. Harutyunyan^*
, P. Specht
, J. Ho
, E. R. Weber

^*此作品的通讯作者

University of California at Berkeley
Lawrence Berkeley National Laboratory

科研成果: 期刊稿件 › 文章 › 同行评审

10 引用（Scopus）

摘要

The anisotropy of elastic bulk constants of wurtzite InN is analyzed theoretically on the basis of available data for elastic constants. A considerable anisotropy is evaluated both for Young's modulus and Poisson ratio of highly textured InN epitaxial films deposited on the basal plane. A comparative analysis of elastic properties is conducted for wurtzite InN, GaN and AlN. An approach is suggested for estimating vacancy concentrations on the basis of SIMS and x-ray diffraction measurements.

源语言	英语
页（从-至）	79-89
页数	11
期刊	Defect and Diffusion Forum
卷	226-228
期	1
DOI	https://doi.org/10.4028/www.scientific.net/ddf.226-228.79
出版状态	已出版 - 2004
已对外发布	是

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abstract = "The anisotropy of elastic bulk constants of wurtzite InN is analyzed theoretically on the basis of available data for elastic constants. A considerable anisotropy is evaluated both for Young's modulus and Poisson ratio of highly textured InN epitaxial films deposited on the basal plane. A comparative analysis of elastic properties is conducted for wurtzite InN, GaN and AlN. An approach is suggested for estimating vacancy concentrations on the basis of SIMS and x-ray diffraction measurements.",

keywords = "Elastic Anisotropy, Point Defects, Strain, Wurtzite Nitrides, X-Ray Diffraction",

author = "Harutyunyan, \{V. S.\} and P. Specht and J. Ho and Weber, \{E. R.\}",

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T1 - Anisotropy of the elastic properties of wurtzite InN epitaxial films

AU - Harutyunyan, V. S.

AU - Specht, P.

AU - Ho, J.

AU - Weber, E. R.

PY - 2004

Y1 - 2004

N2 - The anisotropy of elastic bulk constants of wurtzite InN is analyzed theoretically on the basis of available data for elastic constants. A considerable anisotropy is evaluated both for Young's modulus and Poisson ratio of highly textured InN epitaxial films deposited on the basal plane. A comparative analysis of elastic properties is conducted for wurtzite InN, GaN and AlN. An approach is suggested for estimating vacancy concentrations on the basis of SIMS and x-ray diffraction measurements.

AB - The anisotropy of elastic bulk constants of wurtzite InN is analyzed theoretically on the basis of available data for elastic constants. A considerable anisotropy is evaluated both for Young's modulus and Poisson ratio of highly textured InN epitaxial films deposited on the basal plane. A comparative analysis of elastic properties is conducted for wurtzite InN, GaN and AlN. An approach is suggested for estimating vacancy concentrations on the basis of SIMS and x-ray diffraction measurements.

KW - Elastic Anisotropy

KW - Point Defects

KW - Strain

KW - Wurtzite Nitrides

KW - X-Ray Diffraction

UR - https://www.scopus.com/pages/publications/2942666144

U2 - 10.4028/www.scientific.net/ddf.226-228.79

DO - 10.4028/www.scientific.net/ddf.226-228.79

M3 - 文章

AN - SCOPUS:2942666144

SN - 1012-0386

VL - 226-228

SP - 79

EP - 89

JO - Defect and Diffusion Forum

JF - Defect and Diffusion Forum

IS - 1

ER -

Anisotropy of the elastic properties of wurtzite InN epitaxial films

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