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Formation and characterization of Ni xlnAs/lnAs nanowire heterostructures by solid source reaction

  • Yu Lun Chueh
  • , Alexandra C. Ford
  • , Johnny C. Ho
  • , Zachery A. Jacobson
  • , Zhiyong Fan
  • , Chih Yen Chen
  • , Li Jen Chou
  • , Ali Javey*
  • *此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

The formation of crystalline Ni xnAs and Ni xlnAs/InAs/ Ni xlnAs heterostructure nanowires by the solid source reaction of InAs nanowires with Ni is reported for the first time. The fundamental kinetics of the Ni/lnAs alloying reaction is explored, with the Ni diffusion reported as the rate determining step. The diffusivity of Ni is independent of the nanowire diameter, with an extracted diffusion activation energy of ∼1 eV/atom. The metallic Ni xlnAs exhibits a modest resistivity of ∼167 μΩ.cm for diameters >30 nm, with the resistivity increasing as the nanowire diameter is further reduced due to the enhanced surface scattering. The alloying reaction readily enables the fabrication of Ni xInAs/InAs/ Ni xlnAs heterostructure nanowire transistors for which the length of the InAs segment (i.e., channel length) is controllably reduced through subsequent thermal annealing steps, therefore enabling a systematic study of electrical properties as a function of channel length. From the electrical transport studies, an electron mean free path on the order of a few hundred nm is observed for InAs NWs with a unit length normalized, ON-state resistance of ∼7.5 kΩ/μm. This approach presents a route toward the fabrication for high performance InAs nanowire transistors with ohmic nanoscale contacts and low parasitic capacitances and resistances.

源语言英语
页(从-至)4528-4533
页数6
期刊Nano Letters
8
12
DOI
出版状态已出版 - 12月 2008
已对外发布

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