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Long-period waveguide gratings

  • City University of Hong Kong

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO2/Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18 dB and a minimum 3 dB bandwidth of 6 nm were measured, and the grating length is as short as 1 cm.

源语言英语
主期刊名Proceedings of the 6th Chinese Optoelectronics Symposium, COES 2003
编辑K. T. Chan, H. S. Kwok
出版商Institute of Electrical and Electronics Engineers Inc.
140-143
页数4
ISBN(电子版)0780378873, 9780780378872
DOI
出版状态已出版 - 2003
已对外发布
活动6th Chinese Optoelectronics Symposium, COES 2003 - Hong Kong, 中国
期限: 12 9月 200314 9月 2003

出版系列

姓名Proceedings of the 6th Chinese Optoelectronics Symposium, COES 2003

会议

会议6th Chinese Optoelectronics Symposium, COES 2003
国家/地区中国
Hong Kong
时期12/09/0314/09/03

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