Low-loss polymeric optical waveguides using electron-beam direct writing

W. H. Wong; J. Zhou; E. Y.B. Pun

doi:10.1063/1.1361287

Low-loss polymeric optical waveguides using electron-beam direct writing

W. H. Wong^*
, J. Zhou
, E. Y.B. Pun

^*此作品的通讯作者

City University of Hong Kong

科研成果: 期刊稿件 › 文章 › 同行评审

97 引用（Scopus）

摘要

Low-loss optical waveguides based on a negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and T_g>200°C. For single-mode channel waveguides with upper claddings, the propagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, respectively. For waveguides without upper claddings, the losses were 0.5 dB/cm at both wavelengths. The stability of these waveguides was also investigated, and no significant change was observed after 200 h at 90°C and 95% relative humidity.

源语言	英语
页（从-至）	2110-2112
页数	3
期刊	Applied Physics Letters
卷	78
期	15
DOI	https://doi.org/10.1063/1.1361287
出版状态	已出版 - 9 4月 2001
已对外发布	是

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abstract = "Low-loss optical waveguides based on a negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and Tg>200°C. For single-mode channel waveguides with upper claddings, the propagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, respectively. For waveguides without upper claddings, the losses were 0.5 dB/cm at both wavelengths. The stability of these waveguides was also investigated, and no significant change was observed after 200 h at 90°C and 95\% relative humidity.",

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AU - Zhou, J.

AU - Pun, E. Y.B.

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N2 - Low-loss optical waveguides based on a negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and Tg>200°C. For single-mode channel waveguides with upper claddings, the propagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, respectively. For waveguides without upper claddings, the losses were 0.5 dB/cm at both wavelengths. The stability of these waveguides was also investigated, and no significant change was observed after 200 h at 90°C and 95% relative humidity.

AB - Low-loss optical waveguides based on a negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and Tg>200°C. For single-mode channel waveguides with upper claddings, the propagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, respectively. For waveguides without upper claddings, the losses were 0.5 dB/cm at both wavelengths. The stability of these waveguides was also investigated, and no significant change was observed after 200 h at 90°C and 95% relative humidity.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Low-loss polymeric optical waveguides using electron-beam direct writing

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