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Monolayer resist for patterned contact printing of aligned nanowire arrays

  • Toshitake Takahashi*
  • , Kuniharu Takei
  • , Johnny C. Ho
  • , Yu Lun Chueh
  • , Zhiyong Fan
  • , Ali Javey
  • *此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

Large-area, patterned printing of nanowires by using fluorinated self-assembled monolayers as the resist layer is demonstrated. By projecting a light pattern on the surface of the monolayer resist in an oxygen-rich environment, sticky and nonsticky regions on the surface are directly defined in a single-step process which then enables the highly specific and patterned transfer of the nanowires by the contact printing process, without the need for a subsequent lift-off step. This work demonstrates a simple route toward scalable, patterned printing of nanowires on substrates by utilizing light-tunable, nanoscale chemical interactions and demonstrates the versatility of molecular monolayers for use as a resist layer.

源语言英语
页(从-至)2102-2103
页数2
期刊Journal of the American Chemical Society
131
6
DOI
出版状态已出版 - 18 2月 2009
已对外发布

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