On the zero-order diffraction of phase mask

Peng Yue Wen; Xiao Ming Cui; Hong Du Liu; E. Y.B. Pun; P. S. Chung

doi:10.1088/0256-307X/14/11/009

On the zero-order diffraction of phase mask

Peng Yue Wen
, Xiao Ming Cui
, Hong Du Liu
, E. Y.B. Pun
, P. S. Chung

Peking University
City University of Hong Kong

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

源语言	英语
页（从-至）	830-833
页数	4
期刊	Chinese Physics Letters
卷	14
期	11
DOI	https://doi.org/10.1088/0256-307X/14/11/009
出版状态	已出版 - 1997
已对外发布	是

访问文件

10.1088/0256-307X/14/11/009

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{2eef11e3e3464fbaa4fda51fa301fd2a,

title = "On the zero-order diffraction of phase mask",

abstract = "The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.",

author = "Wen, \{Peng Yue\} and Cui, \{Xiao Ming\} and Liu, \{Hong Du\} and Pun, \{E. Y.B.\} and Chung, \{P. S.\}",

year = "1997",

doi = "10.1088/0256-307X/14/11/009",

language = "英语",

volume = "14",

pages = "830--833",

journal = "Chinese Physics Letters",

issn = "0256-307X",

publisher = "IOP Publishing Ltd.",

number = "11",

}

TY - JOUR

T1 - On the zero-order diffraction of phase mask

AU - Wen, Peng Yue

AU - Cui, Xiao Ming

AU - Liu, Hong Du

AU - Pun, E. Y.B.

AU - Chung, P. S.

PY - 1997

Y1 - 1997

N2 - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

AB - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.

UR - https://www.scopus.com/pages/publications/0031324308

U2 - 10.1088/0256-307X/14/11/009

DO - 10.1088/0256-307X/14/11/009

M3 - 文章

AN - SCOPUS:0031324308

SN - 0256-307X

VL - 14

SP - 830

EP - 833

JO - Chinese Physics Letters

JF - Chinese Physics Letters

IS - 11

ER -

On the zero-order diffraction of phase mask

摘要

访问文件

其它文件与链接

学术指纹

引用此