@inproceedings{f9d7f504012b42469841ef5e83ae57c0,
title = "Polymeric optical waveguides fabrication by direct write electron beam lithography",
abstract = "Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31um and 1.55um, respectively.",
author = "Jun Zhou and Wong, \{W. H.\} and Pun, \{E. Y.B.\}",
note = "Publisher Copyright: {\textcopyright} 2001 OSA/NLGW 2001, {\textcopyright} 2000 Optical Society of America.; Nonlinear Guided Waves and Their Applications, NLGW 2001 ; Conference date: 26-03-2001",
year = "2001",
language = "英语",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
pages = "55--57",
booktitle = "Nonlinear Guided Waves and Their Applications, NLGW 2001",
address = "美国",
}