Single-/multi-mode tunable lasers using MEMS mirror and grating

A. Q. Liu; X. M. Zhang; J. Li; C. Lu

doi:10.1016/S0924-4247(03)00368-6

Single-/multi-mode tunable lasers using MEMS mirror and grating

A. Q. Liu^*
, X. M. Zhang
, J. Li
, C. Lu

^*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

19 引用（Scopus）

摘要

The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

源语言	英语
页（从-至）	49-54
页数	6
期刊	Sensors and Actuators, A: Physical
卷	108
期	1-3
DOI	https://doi.org/10.1016/S0924-4247(03)00368-6
出版状态	已出版 - 15 11月 2003
已对外发布	是

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abstract = "The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.",

keywords = "Blazed grating, DWDM, MEMS, Optical MEMS, Tunable laser",

author = "Liu, \{A. Q.\} and Zhang, \{X. M.\} and J. Li and C. Lu",

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AU - Liu, A. Q.

AU - Zhang, X. M.

AU - Li, J.

AU - Lu, C.

PY - 2003/11/15

Y1 - 2003/11/15

N2 - The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

AB - The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.

KW - Blazed grating

KW - DWDM

KW - MEMS

KW - Optical MEMS

KW - Tunable laser

UR - https://www.scopus.com/pages/publications/0344083445

U2 - 10.1016/S0924-4247(03)00368-6

DO - 10.1016/S0924-4247(03)00368-6

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SN - 0924-4247

VL - 108

SP - 49

EP - 54

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1-3

ER -

Single-/multi-mode tunable lasers using MEMS mirror and grating

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